Surface Modification of CrN Coating by Plasma Oxidation Process


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In this study, the CrN coating was first deposited on tool steels by cathodic arc evaporation technique and then this coating was subjected to oxygen glow discharge to activate the oxidation process in order to form oxide layer on the surface of the CrN coating. The varied properties of CrN coatings with or without oxidation treatment were studied in terms of hardness, adhesion, microstructure and surface morphology by using XRD, AFM, Rockwell indentation, Nano-indentation tests. The result turned out that the effect of the plasma oxidation process on the hardness of CrN coating was improved due to the oxide layer on the surface.



Key Engineering Materials (Volumes 373-374)

Main Theme:

Edited by:

M.K. Lei, X.P. Zhu, K.W. Xu and B.S. Xu




W. Y. Ho et al., "Surface Modification of CrN Coating by Plasma Oxidation Process", Key Engineering Materials, Vols. 373-374, pp. 371-374, 2008

Online since:

March 2008




[1] Y.L. Su, S.H. Yao, Wear 205(1997), p.112.

[2] A. Matthews, A. Leyland, Surf. Coat. Technol., 71 (1995), p.88.

[3] M. Van Stappen, L.M. Stals, M. Kerkhofs, C. Quaeyhaegens, Surf. Coa. Technol., 74-75 (1995), p.629.

[4] S.C. Lee, W.Y. Ho, F.D. Lai, Matls. Chem. and Phy. 43 (1996), p.266.

[5] S.H. Ahn, Y.S. Choi, J.G. Kim, J.G. Han, Surf. Coati. Technol., 150 (2002), p.319.

[6] S. Han, J.H. Lin, J.J. Kuo, J.L. He, H.C. Shih, Surf. Coat. Technol., 161 (2002), p.20.

[7] W. Y. Ho, C.H. Hsu, D.H. Huang, L.T. Huang, D.Y. Wang, Surf. Coat. Technol., 177-178 (2004), p.172.

[8] K. -T. Rie, Surf. Coat. Technol., 112 (1999), p.56.

[9] Y. Izumi, M. Katoh, T. Ohte, S. Ohtani, A. Kojima, N. Saitoh, Applied Surf. Sci., 100/101 (1996), p.179.

[10] W. Brandle, G. Marginean, Thin Solid Films, 447-448 (2004), p.181.

[11] Y. Chiba, K. Kashiwagi, H. Kokai, Vacuum 74 (2004), p.643.

[12] Handbook of X-ray Photoreactron Spectroscopy, Perkin-Elmer Coperation, Physical Electronics Division, Oct. (1992).