TY - JOUR
T1 - Measurement Method for Micro-Cavity Based on Improved MAP Algorithm
AU - Cui, Ji Wen
AU - Tan, Jiu Bin
AU - Shi, Q.
JF - Key Engineering Materials
VL - 381-382
SP - 191
EP - 194
SN - 1662-9795
PY - 2008
PB - Trans Tech Publications
DO - 10.4028/www.scientific.net/KEM.381-382.191
UR - http://www.scientific.net/KEM.381-382.191
KW - Curvature of Field
KW - Huber-Markov Random Filed
KW - Image Processing
KW - Improved MAP Algorithm
KW - Measurement of Micro-Cavity
KW - Optical Metrology
AB - In order to improve the measurement precision, an improved MAP algorithm is proposed to
increase the edge aiming precision in this paper. The algorithm breaks the limitation of degenerated
model, takes two actual factors into account, one is the distortion caused by motion, which solved by
Huber-Markov random filed in the improved MAP algorithm, and the other is curvature of field,
which solved by Delaunay triangle method. The algorithm can restore the high-frequency information
of image, keep the edge character of image, and increase the aiming precision of the edge during the
measurement. The experiments show that the uncertainty of location for the image captured in the
measurement can be improved three folds, and the repeatability uncertain is less then 0.8µm when the
diameter of φ0.2mm hole is measured using the proposed MAP algorithm and length-measuring
interferometer together.
ER -