Autofocusing System for Optical Microscope Based on DVD Pick-Up Head


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This paper presents an autofocusing system for an optical microscope (OM) based on a low-cost, highly-sensitive laser focusing probe integrated with a precision stepper positioning stage. During the OM measurement procedure, the laser focusing probe detects variations in the distance between the glass substrate containing the specimen of interest and the OM objective lens and generates a driving signal to adjust the position of the OM via the precision positioning stage such that a precisely-focused image is obtained. The experimental results show that the integrated laser focusing probe and positioning stage complete the autofocusing process within 0.5 seconds.



Key Engineering Materials (Volumes 381-382)

Edited by:

Wei Gao, Yasuhiro Takaya, Yongsheng Gao and Michael Krystek




C.L. Chu et al., "Autofocusing System for Optical Microscope Based on DVD Pick-Up Head", Key Engineering Materials, Vols. 381-382, pp. 321-322, 2008

Online since:

June 2008




[1] K.C. Fan, C.L. Chu and J.I. Mou: Measurement Science and Technology, Vol. 12 (2001), pp.2137-2146.