The Design and Use of F1 Softgauges for Validating Surface Metrology Software

Abstract:

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This paper presents a methodology for validating surface metrology software. Based uncertainty analysis, a set of reference data sets with mathematical correct results, call the type F1 softgauges, have been developed. Special designed profiles can be used to check specification uncertainty and algebra calculation is used to lower method uncertainty. The results shown that specification uncertainties were main uncertainty contributors.

Info:

Periodical:

Key Engineering Materials (Volumes 381-382)

Edited by:

Wei Gao, Yasuhiro Takaya, Yongsheng Gao and Michael Krystek

Pages:

643-646

DOI:

10.4028/www.scientific.net/KEM.381-382.643

Citation:

T. Li et al., "The Design and Use of F1 Softgauges for Validating Surface Metrology Software", Key Engineering Materials, Vols. 381-382, pp. 643-646, 2008

Online since:

June 2008

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Price:

$35.00

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