The Design and Use of F1 Softgauges for Validating Surface Metrology Software
This paper presents a methodology for validating surface metrology software. Based uncertainty analysis, a set of reference data sets with mathematical correct results, call the type F1 softgauges, have been developed. Special designed profiles can be used to check specification uncertainty and algebra calculation is used to lower method uncertainty. The results shown that specification uncertainties were main uncertainty contributors.
Wei Gao, Yasuhiro Takaya, Yongsheng Gao and Michael Krystek
T. Li et al., "The Design and Use of F1 Softgauges for Validating Surface Metrology Software", Key Engineering Materials, Vols. 381-382, pp. 643-646, 2008