The erosion process in micro-machining of brittle glasses using a low pressure slurry jet is discussed. The process capability of the technique is assessed by examining the machined surface integrity in relation to fluid flow dynamics in micro-hole generations. The holes produced are characterised by a “W” shape in the cross section, while the surface morphology is distinguished by three zones associated with the fluid flow behaviour, i.e. a direct impact zone, a wavy zone and an accumulation zone. The surfaces appear to be smooth and without cracks, indicating a predominance of the ductile mode erosion process. With the increase of pressure, the erosion rates can be enhanced as a result of the expending of the accumulation zone while the outer diameter of the holes remains unchanged. This study shows that this technique can be used for micro-machining with high surface quality, and provides an essential understanding for further research in the avenue.