Design of Double Nozzle Type Powder Jet Device Optimized for PJD


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Thick films are needed in micro-electro-mechanical systems (MEMS) as insulation, piezoelectric and ferroelectric materials. To form the thick film, powder jet deposition (PJD) method has been proposed. In the PJD process, microparticles are sprayed out from nozzle under the conditions of room temperature and atmospheric pressure, and make a film on the substrate. We have developed a new jet mechanism of double-nozzle type, and reported its results previously [1]. In this study, we optimized the shape of the nozzle through investigating the influence of different dimensions and shape of the nozzle on the particles blasting velocity. As a result, it is found that nozzle diameter has a large affect on particles velocity.



Key Engineering Materials (Volumes 389-390)

Edited by:

Tsunemoto Kuriyagawa, Libo Zhou, Jiwang Yan and Nobuhito Yoshihara






T. Shibuya et al., "Design of Double Nozzle Type Powder Jet Device Optimized for PJD", Key Engineering Materials, Vols. 389-390, pp. 398-403, 2009

Online since:

September 2008




[1] N. Yoshihara, T. Kuriyagawa, Y. Yasutomi and K. Ogawa: International Conference on Leading Edge Manufacturing in 21 st Century, (2005) pp.833-838.

[2] T. Shibuya, K. Mizutani, N. Yoshihara, J. Yan, T. Kuriyagwa and Z. S. Sepasy: 10 th Inter national Symposium of Advances in Abrasive Technology, (2007) pp.655-661.

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