Scale Effect of Nano-Indentation of Silicon – A Molecular Dynamics Investigation

Abstract:

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This paper investigates the scale effect of indenter tip radius on the deformation of silicon under nanoindentation using molecular dynamics simulation. It was found that with larger diamond tips a six-coordinated silicon phase different from β-silicon on loading and a diamond like crystal beneath the indenter on unloading would appear as a result of the indentation stressing. This is a new phenomenon that has not been observed previously.

Info:

Periodical:

Key Engineering Materials (Volumes 389-390)

Edited by:

Tsunemoto Kuriyagawa, Libo Zhou, Jiwang Yan and Nobuhito Yoshihara

Pages:

521-526

DOI:

10.4028/www.scientific.net/KEM.389-390.521

Citation:

K. Mylvaganam and L. C. Zhang, "Scale Effect of Nano-Indentation of Silicon – A Molecular Dynamics Investigation", Key Engineering Materials, Vols. 389-390, pp. 521-526, 2009

Online since:

September 2008

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Price:

$35.00

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