SiAlONs and Non-oxides

Volume 403

doi: 10.4028/

Paper Title Page

Authors: Takafumi Kusunose, Tohru Sekino

Abstract: Two types of Aluminum nitride (AlN) based ceramic nanocomposite with multifunctionality were investigated to improve machinability or...

Authors: Naohito Yamada, Jun Yoshikawa, Yuji Katsuda, Hiroaki Sakai

Abstract: Aluminum Nitride (AlN) ceramics are used as wafer heating plates and wafer holding electrostatic chucks in semiconductor fabrication...

Authors: Hiroyuki Miyazaki, Hideki Hyuga, Yuichi Yoshizawa, Kiyoshi Hirao, Tatsuki Ohji

Abstract: Six kinds of silicon nitrides with different microstructures were fabricated by changing the amount of sintering additives, Al2O3 and Y2O3. ...

Authors: Junichi Takahashi, Takayuki Suehiro

Abstract: Oxidation behavior of R4Si2O7N2 (J-phase; R = Y and rare-earth element) has been investigated by thermometric measurements in air. All...

Authors: Hyeon Keun Lee, Do Kyung Kim

Abstract: The high thermal conductivity of Aluminum nitride, coupled with its high electrical resistivity and nontoxic nature, makes it a very...

Authors: Sang Kee Lee, Ikuko Yamada, Shoichi Kume, Hiromi Nakano, Koji Watari

Abstract: The thermal conductivity at the micrometer-scale of AlN ceramics with eliminated grain boundary phase was measured by the thermoreflectance...

Authors: Noritaka Saito, Daiji Nakata, Sohei Sukenaga, Kunihiko Nakashima

Abstract: Viscosities of molten RE-Mg-Si-O-N (RE=Y, Gd, Nd and La) glasses have been measured using rotating bob viscometer with a gas tight furnace...

Authors: Isao Tanaka, Akihide Kuwabara, Koretaka Yuge, Atsuto Seko, Fumiyasu Oba, Katsuyuki Matsunaga

Abstract: The phase stability of silicon nitride is examined using a series of first principles phonon calculations. -phase shows slightly higher...

Authors: Peter Kroll

Abstract: A combination of first-principle and thermochemical calculations is applied to compute the phase diagrams of rhenium-nitrogen and of...


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