Thermal barrier coatings (TBCs) have been employed for the insulation of substrates from high temperature in gas turbine plants. The TBC system consists of ceramic top coating, metallic bond coating and substrate. Delamination of the ceramic coating is important problem in TBC systems. In this paper, the delamination mechanism was studied by residual stress history under thermal aging and thermal cycle conditions. In-plane residual stress histories of ceramic coating and bond coating after thermal aging and cycling were measured by X-ray diffraction method. The residual stress under thermal cycling was also calculated by FEM analysis. The results obtained were as follows: (1) in-plane surface residual stresses of the coatings scarcely changed regardless of the increase of thermally grown oxidation (TGO). (2) high compressive thermal stress, residual stress at room temperature, in ceramic coating induced by thermal stress did not occur. It was found that stress of ceramic top coating was relaxed by micro cracks and driving stress of delamination was in-plane high compressive stress.