Study on Deposition of NCD on AFM Probe

Abstract:

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The performance of Atomic Force Microscope (AFM) is greatly determined by the quality of its probe. Nowadays, probes of diamond tips have become more and more popular than silicon ones, and have been widely used in industries. In this paper, research about the fabricating of nanocrystalline diamond (NCD) coated AFM probe has been done using Hot-Filament Chemical Vapour Deposition (HFCVD) technique. The results showed that NCD films have been grown on the probe. Problems about the growth of NCD on the tips have been discussed. The optimum parameters have also been proposed. This research can provide reference for the further experiments on the fabrication of NCD coated tips.

Info:

Periodical:

Key Engineering Materials (Volumes 431-432)

Edited by:

Yingxue Yao, Dunwen Zuo and Xipeng Xu

Pages:

499-502

DOI:

10.4028/www.scientific.net/KEM.431-432.499

Citation:

M. M. Huang et al., "Study on Deposition of NCD on AFM Probe", Key Engineering Materials, Vols. 431-432, pp. 499-502, 2010

Online since:

March 2010

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Price:

$35.00

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