Preparation of Compositionally Graded CVD SiC Oxidation-Resistant Coating
A SiC coating was chemical vapour deposited (CVD) on a Cf/SiC composite with the ratio of H2 and methyltrichlorosilane (MTS) changed gradually from 6:1 to 12:1 during the CVD processing. Energy-dispersive spectrometry (EDS) of the coating showed that the content of C decreased while Si increased continuously from the interface between coating and Cf/SiC substrate to the outside surface of coating. The obtained compositionally graded structure effectively reduced the generation of microcracks by releasing the mismatch of CTE of the coating and the composite.
Wei Pan and Jianghong Gong
J. Tang et al., "Preparation of Compositionally Graded CVD SiC Oxidation-Resistant Coating", Key Engineering Materials, Vols. 434-435, pp. 562-564, 2010