Influence of Liquid Evaporation on the Components of SiC High Emissivity Coating

Abstract:

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The process of Electron Beam-Physical Vapor Deposition (EB-PVD) preparing SiC coating with liquid evaporation was firstly discussed from a thermodynamic viewpoint. The results showed that the ratio of SiC in the as-deposited coating gradually increases and tends to reach a stable maximum of 0.73 with the evaporation temperature increase from 2500 K to 3400 K. To verify the thermodynamic analysis, amorphous SiC coating was deposited on Si substrate by EB-PVD at 3100 K. SiC concentration across the cross section of coating was calculated from the area of elements spectrum in X-ray photoelectron spectroscopy (XPS) depth profile analysis. The results showed that the average SiC concentration was about 0.7.

Info:

Periodical:

Key Engineering Materials (Volumes 434-435)

Edited by:

Wei Pan and Jianghong Gong

Pages:

568-571

DOI:

10.4028/www.scientific.net/KEM.434-435.568

Citation:

J. Yi et al., "Influence of Liquid Evaporation on the Components of SiC High Emissivity Coating", Key Engineering Materials, Vols. 434-435, pp. 568-571, 2010

Online since:

March 2010

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Price:

$35.00

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