Influence of Liquid Evaporation on the Components of SiC High Emissivity Coating
The process of Electron Beam-Physical Vapor Deposition (EB-PVD) preparing SiC coating with liquid evaporation was firstly discussed from a thermodynamic viewpoint. The results showed that the ratio of SiC in the as-deposited coating gradually increases and tends to reach a stable maximum of 0.73 with the evaporation temperature increase from 2500 K to 3400 K. To verify the thermodynamic analysis, amorphous SiC coating was deposited on Si substrate by EB-PVD at 3100 K. SiC concentration across the cross section of coating was calculated from the area of elements spectrum in X-ray photoelectron spectroscopy (XPS) depth profile analysis. The results showed that the average SiC concentration was about 0.7.
Wei Pan and Jianghong Gong
J. Yi et al., "Influence of Liquid Evaporation on the Components of SiC High Emissivity Coating", Key Engineering Materials, Vols. 434-435, pp. 568-571, 2010