Microstructure and Properties of TiAlN/AlN Composite Film Deposited on Cam’s Profile by Ion Beam Sputtering Technique


Article Preview

The study reports a new surface formation technology during manufacturing process of parallel indexing cam mechanism, ion beam sputtering deposition, in which the operation temperature can be controlled below the limitation of phases exchanging or at room temperature. Phase exchanging deformation can be avoided and the shape accuracy and dimension accuracy can be improved compared with surface quenching process. The microstructure and properties of TiAlN/AlN composite film deposited on the profile surface of cam (made of 45 steel) by ion beam sputtering deposition were discussed. X-ray diffraction (XRD), scanning electron microscopy (SEM) and transmission electron microscope (TEM) analysis has been used to characterize film’s microstructure and properties. The micro-hardness and adherence grade were tested.



Edited by:

Jun Wang,Philip Mathew, Xiaoping Li, Chuanzhen Huang and Hongtao Zhu




P. Q. Guo et al., "Microstructure and Properties of TiAlN/AlN Composite Film Deposited on Cam’s Profile by Ion Beam Sputtering Technique", Key Engineering Materials, Vol. 443, pp. 465-468, 2010

Online since:

June 2010




[1] Joong-Ho Shin, Ho-Eop Yoon and Yuhua Zhang: International Journal of the Korean Society of Precision Engineering, Vol. 3(2002), p.50.

[2] Giorgio Figliolini, Pierluigi Rea and Jorge Angeles: Mechanism and Machine Theory, Vol. 41(2006), p.1320.

DOI: https://doi.org/10.1016/j.mechmachtheory.2006.01.002

[3] Eing-Jer Wei, Hsin-Yi Lai and Chao-Kuang Chen: Journal of Materials Processing Technology, Vol. 100 (2000), p.147.

DOI: https://doi.org/10.1016/s0924-0136(99)00370-2

[4] Ronghua Wei: Surface and Coatings Technology, Vol. 203(2008), p.538.

[5] C. Bundesmann, I. -M. Eichentopf and S. Mändl, et al: Thin Solid Films, Vol. 516(2008), p.8604.

[6] S. Y. Lee, S. C. Wang and J. S. Chen, et al: Thin Solid Films, Vol. 516(2008), p.7816.

[7] J. L. Mo, M. H. Zhu, B. Lei, Y. X. Leng and N. Huang: Wear, Vol. 263 (2007), p.1423.

[8] T. Suzuki, Y. Makino, M. Samandi and S. Miyake: J. of materials science, Vol. 35(2000), p.4193.

[9] F. Quesada, A. Marino and E. Restrepo: Surface and coating technology, Vol. 201-6(2006), p.2925.

[10] Harish C. Barshilia, K. Yogesh and K.S. Rajam : Vacuum, Vol. 83(2009), p.427.