Micro-Object Orientation Control by Using Different Vibration Modes of Board Stage
This paper deals with an orientation control method for micro objects, which have a size in the order of 100 micro meters, by using a board stage that is vibrated in the natural frequencies of various vibration modes. Orientation control is important for manufacturing processes, such as the assembling of small parts. Since it is difficult to grip and to manipulate micro objects, a simple and reliable method is desired. In this paper, the vibration mode is used for generating different motions of the stage and for controlling the orientation of the objects on the stage. Since each vibration mode has a unique vibration motion, different motions can be selected by choosing the vibration frequency. In order to design the stage so that the objects turn toward target direction, Finite Element Method (FEM) analysis was applied. And, the designed vibration stage was fabricated using a stainless steel thin plate. Experimental results showed that the actual vibration is similar with the simulation results. As an example of the orientation control of the micro objects, some small electronics parts were tested and they could be turned toward the target directions.
Jianhong Zhao, Masanori Kunieda, Guilin Yang and Xue-Ming Yuan
T. Tateno et al., "Micro-Object Orientation Control by Using Different Vibration Modes of Board Stage", Key Engineering Materials, Vols. 447-448, pp. 488-492, 2010