Development of Piezo Driven Inchworm Micro X-Y Stage and Hemispherical Tilting Positioner with Microscope Head
This paper deals with small piezo driven inchworm X-Y stage for a cell-manipulation in SEM chamber. Generally the electric noise from the moto causes the image destorsion in SEM operation. Thus the piezo driven inchworm small X-Y stage has been designed and fabricated as well as another tilting mechanism has been developed so that a micro pipettee can be implemented onto this tilting stage and manipulate such bio cell samples. Here we also developed a manipulation tool with micro force indicating system by using acoustic modulation technique since the microscopic operation in SEM without tactile information is difficult for the operator to control the tool precisely. On the other hand, a self-walking wafer inspection system is also described. The unique system is composed of the hemispherical manipulator and a self-walking piezo driven stage. This small walking mechanism can move on the glass plate that covers on the micro patterned plate. The hemispherical ball with microscope lens that can be rotated by the manner of stick-slip with three point contact piezo actuators is mounted on this self-walking stage so that the microscope lens can be focused onto the target sample to investigate the defect of micro patterns on the printed plate.
Jianhong Zhao, Masanori Kunieda, Guilin Yang and Xue-Ming Yuan
H. Aoyama et al., "Development of Piezo Driven Inchworm Micro X-Y Stage and Hemispherical Tilting Positioner with Microscope Head", Key Engineering Materials, Vols. 447-448, pp. 513-517, 2010