An Optical Fiber Probe for 3-D Micro Metrology

Abstract:

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This paper presents a system of 3-D micro structure measurement that uses an optical fiber probe of 5 µm in diameter. The probe is deflected when it comes into contact with a measured surface, and this deflection is measured optically. In this research, we optimize design parameters of optical system using ray tracing, and a prototype of the measuring system is fabricated on trial to verify the simulation results. Then, its measuring accuracies are examined by using the basic experimental apparatus. As a result, it is clarified that the resolution of the fiber probe is better than 10 nm. Also, the utility of this system is confirmed by measuring the shape of a 600 µm diameter ruby sphere.

Info:

Periodical:

Key Engineering Materials (Volumes 447-448)

Edited by:

Jianhong Zhao, Masanori Kunieda, Guilin Yang and Xue-Ming Yuan

Pages:

524-528

DOI:

10.4028/www.scientific.net/KEM.447-448.524

Citation:

H. Murakami et al., "An Optical Fiber Probe for 3-D Micro Metrology", Key Engineering Materials, Vols. 447-448, pp. 524-528, 2010

Online since:

September 2010

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Price:

$35.00

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