Fatigue Testing of Thin Films
Thin film processing has been a driving technology in microelectronics and mechanics for years. The reliability of such devices is often limited by the failure of thin films. Therefore a deeper understanding of fatigue mechanisms of thin films through experiments is necessary to develop physical based lifetime models. Thus, this paper focuses on a novel setup for micro beam bending of thin metal films on Si cantilever substrate and first results will be presented.
S. Burger et al., "Fatigue Testing of Thin Films", Key Engineering Materials, Vol. 465, pp. 552-555, 2011