Modeling of a Direct-Drive Table for Automatic Wire Bonder
This paper presents the modeling of a high-accuracy and high-acceleration table used for automatic wire bonder. The table is directly driven by linear voice coil motor (LVCM), and thus the mass and inertia of the motion system are significantly reduced by using a novel flexible decoupling mechanism based on flexure hinges and preloaded spring. The decoupling principle of the mechanism was introduced, and the electromechanical coupled mathematical model of Y-axis table was evaluated according to the dynamics of a mechanical mass-spring-damp system and LVCM. The model of Y-axis table was then identified with the aid of a Laser Interferometer and data acquirement card. Model validation experiments were carried out, and the results show that the model has sufficient accuracy when used to predict the performances of the real-world system under new conditions, and meanwhile it also can provide important information for the control of Y-axis table.
F. J. Wang et al., "Modeling of a Direct-Drive Table for Automatic Wire Bonder", Key Engineering Materials, Vols. 467-469, pp. 1315-1318, 2011