An Experimental Study on the Side-Opening Filling Process at the Interface between Microchannels with Different Widths

Abstract:

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Micro/nanochannel is of great importance due to its wide applications in micro total analysis system. In a given micro/nanofluidic device, the nanochannel and microchannel can works as function provider and reagent delivering passage, respectively. The easiest way to fabricate micro/nanochannel is depositing material onto a predefined microchannel until nanometer-sized pattern is obtained. Although the deposition process inside the microchannel has been studied before, the filling performance at the side-opening, the connection between microchannels with different widths, is limited studied. The different filling performance at side-opening will lead to a distinct geometrical size. In this work, side-opening filling process during a low pressure chemical vapor deposition of silicon dioxide onto pre-etched microchannels with patterns of straight, triangle and rhombus shapes was preliminarily studied. A filling factor was defined to describe the side-opening filling performance. The present results indicated that the side-opening filling will be affected by the side-opening width, the depth of the microchannel and the microchannel shape.

Info:

Periodical:

Edited by:

Xiaohao Wang

Pages:

293-296

DOI:

10.4028/www.scientific.net/KEM.483.293

Citation:

F. Xie et al., "An Experimental Study on the Side-Opening Filling Process at the Interface between Microchannels with Different Widths", Key Engineering Materials, Vol. 483, pp. 293-296, 2011

Online since:

June 2011

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Price:

$35.00

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