Multidisciplinary Design Optimization of the 2-D Microaccelerometer
Multidisciplinary design optimization of a 2-D microaccelerometer is discussed. Considering the influence of microstructure design, fabrication process and detection circuit, as well as the constraints of fabrication limitations, damp design and adhesion factor, a multidisciplinary optimization model is developed by global criterion method, where the sensitivity, resolution, resonant frequency and damping ratio are selected as objective functions. Furthermore, the multi-objective optimum of the model is obtained by genetic algorithm.
Y. Liu et al., "Multidisciplinary Design Optimization of the 2-D Microaccelerometer", Key Engineering Materials, Vol. 483, pp. 647-652, 2011