Multidisciplinary Design Optimization of the 2-D Microaccelerometer

Abstract:

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Multidisciplinary design optimization of a 2-D microaccelerometer is discussed. Considering the influence of microstructure design, fabrication process and detection circuit, as well as the constraints of fabrication limitations, damp design and adhesion factor, a multidisciplinary optimization model is developed by global criterion method, where the sensitivity, resolution, resonant frequency and damping ratio are selected as objective functions. Furthermore, the multi-objective optimum of the model is obtained by genetic algorithm.

Info:

Periodical:

Edited by:

Xiaohao Wang

Pages:

647-652

DOI:

10.4028/www.scientific.net/KEM.483.647

Citation:

Y. Liu et al., "Multidisciplinary Design Optimization of the 2-D Microaccelerometer", Key Engineering Materials, Vol. 483, pp. 647-652, 2011

Online since:

June 2011

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$35.00

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