MEMS/NEMS Nano Technology

Volume 483

doi: 10.4028/

Paper Title Page

Authors: Yang Liu, Ling Yun Wang, Ting Ping Lei, Jiang Du, Yi Wen Jiang, Dao Heng Sun

Abstract: In this paper, a differential and decoupled micromachined gyroscope fabricated by through-etching the silicon substrate anodically bonded on...

Authors: Da Yong Yang

Abstract: Analytical solutions for potential distributions, velocity distributions of the mixed electroosmotic and pressure-driven flow in rectangular...

Authors: Yang He, Cheng Yu Jiang, Wei Zheng Yuan, Kai Leung Yung, Yan Xu

Abstract: The purpose of this paper is to introduce a simplified yet efficient method to identify the critical parameter of MEMS device based on rapid...

Authors: Xiao Hong Sui, Fei Tan, Qiu Shi Ren

Abstract: The electrochemical stability of the implantable microelectrode array is one of the most important considerations for effective neural...

Authors: Wei Wang, Xin Wang, Tuo Li, Wei Ping Chen

Abstract: Multi-wall Carbon Nanotubes (MWNTs) is the new hotspot material as the active sensing element, but there is no certain theory on the...

Authors: Chuan Qin Liu, Wen Zhong Lou, Long Fei Zhang, Yong Jia Lv

Abstract: This paper describes the delayed effect on the motion characteristics of the slider in the S&A mechanism resulting from the micro-zigzag...

Authors: Yong Jia Lv, Wen Zhong Lou, Chuan Qin Liu, Long Fei Zhang

Abstract: A novel latch mechanism of centrifugal system in the MEMS fuze S&A mechanism was mechanically analyzed by FEA. By the analysis, the...

Authors: Jian Ning Ding, Feng Ye, Shu Bo Wang, Ning Yi Yuan

Abstract: In this paper we present a system study of phosphorus-doped hydrogenated silicon (Si:H) films prepared on glass by plasma enhanced chemical...

Authors: Yun Tao Liu, Xiao Wei Liu, Wei Ping Chen, Qun Wu

Abstract: A nonlinearity model including distortion components for sigma-delta (ΣΔ) accelerometer that allows stability analysis is described. Based...

Authors: Fei Tang, Zi Lin Yan, Xiao Hao Wang

Abstract: Travelling wave wall used for Micro Air Vehicle flow control is studied to find out its drag reduction effect. Aerodynamic characteristics...


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