MEMS/NEMS Nano Technology

Volume 483

doi: 10.4028/

Paper Title Page

Authors: Li Bo Zhao, Jian Qiang Liang, Yu Long Zhao, Jian Zhu Wang, Wei Chen, Zhuang De Jiang, Yong Li

Abstract: Based on piezoelectric effect of quartz crystal, a piezoelectric sensor with the range of 150 kN has been developed for weighing in motion...

Authors: Yi Zhou, Xiao Pin Liao, Jian Bin Xiao

Abstract: Lifetimes of RF MEMS (Micro-electro-mechanical systems) capacitive switches are hindered by dielectric charging effects. A novel test...

Authors: Wei Ping Chen, Chang Chun Dong, Xiao Wei Liu, Zhi Ping Zhou

Abstract: In this paper, the writers reported on a fluxgate sensor and a CMOS-ASIC for sensor supply. The design method and principle of the interface...

Authors: Hai Lin Tang, Xian Xue Liu, Hao Zhou

Abstract: A z-axis decoupled micromachined gyroscope with dual frames is designed, fabricated and tested. The robust structure considering fabrication...

Authors: Ting Liang, Jian Jun Tang, Qian Qian Zhang, Yong Wang, Jing Li, Jun Liu, Ji Jun Xiong

Abstract: In this paper, We use a novel principle to detect acceleration and report how I-V characteristics and piezoresistance coefficient of...

Authors: Li Dong Du, Li Xiao, Zhan Zhao, Zhen Fang, Jing Xu, Jun Juan Zhao, Yun Dong Xuan

Abstract: Temperature characteristic of platinum piezoresistive atmosphere pressure sensor is studied in this paper, in which platinum is used as the...

Authors: Chi Zhang, Zheng You, Hu Huang

Abstract: This paper presents design methodology, dynamics simulation and fabrication process of a magnetically actuated two-dimensional MOEMS...

Authors: Yang Zheng, Dan Xie, Jing Ma, Tian Ling Ren, Li Tian Liu

Abstract: A new type of magnetic sensor based on magnetoelectric(ME) composites has been designed and fabricated. The ME composites has a...

Authors: Heng Liu, Xiao Ping He, Wei Su, Fu Tang Zhang

Abstract: The main advantage of a resonant accelerometer based on electrostatic stiffness over other sensing principles is it can make use of the...

Authors: Xiao Feng Zhao, Dian Zhong Wen, Yang Li, Yuan Xin Hou, Chun Peng Ai, Zhi Qiang Wang, De Jun Xiu

Abstract: A polysilicon nano-thin films pressure sensor was designed and fabricated on single crystal silicon substrate by MEMS technology in this...


Showing 31 to 40 of 154 Paper Titles