MEMS/NEMS Nano Technology

Volume 483

doi: 10.4028/

Paper Title Page

Authors: Chin Lung Chang, Weij Hong Ju, Ching Liang Liou, Jik Chang Leong, Lung Ming Fu

Abstract: This paper uses a femtosecond laser scriber to perform the direct-writing ablation of glass substrate for the development of microfluidic...

Authors: Yao Nan Wang, Ching Liang Liou, Ming Chang Wu, Chien Hsiung Tsai, Lung Ming Fu

Abstract: A rapid and simple technique was developed for detecting methanol with very small amount of sample by using PMMA (Polymethyl-Methacrylate)...

Authors: Jian Zhang, Zhao Hua Zhang, Tao Chen, Xiang Ming Kong, Tian Ling Ren, Li Tian Liu

Abstract: TPMS (Tire Pressure Monitoring System) has played a more and more significant role in safely driving nowadays. Low power consumption and...

Authors: Li Bo Zhao, En Ze Huang, Gui Ming Zhang, Yu Long Zhao, Xiao Po Wang, Zhuang De Jiang, Zhi Gang Liu

Abstract: A kind of fluid density sensor based on MEMS (Micro-Electro-Mechanical-System) technology is introduced with trapezoidal cantilever...

Authors: Yang Gao, Ying Duan Chen, Shi Wei Xi, Ying Bin Zheng, Chao Zhang

Abstract: Rapid development of wireless communication system requires high frequency and high power surface acoustic wave (SAW) filter. For SAW RF...

Authors: Zheng Han Zhu, Jing Quan Liu, Yue Feng Rui, Chun Sheng Yang

Abstract: Signal acquisition microelectrode works as an interface between tissue and circuit in neural engineering. Stable, precise and lossless...

Authors: Xun Jun He, Zhi Qiu Lv, Bo Liu, Zhi Hong Li

Abstract: This paper presents a lateral thermally-actuated and laterally capacitive shunt MEMS switch utilizing parylene as the dielectric layer. The...

Authors: Guan Shi Wang, Xiao Wei Liu, Bing Jun Lv, Liang Yin, Yi Ming Jiang, Mu Tao

Abstract: In this work, closed-loop self-oscillating driving circuits for gyroscopes based on DC PI controller are analyzed in theory. The condition...

Authors: Hui Chao Liu, Wen Zhong Lou, Chao Gao, Shao Peng Zu

Abstract: This paper presents a Shrapnel-borne meteorological exploration system based on MEMS sensor for atmospheric pressure, MEMS sensor for...

Authors: Qing He, Jing Quan Liu, Chun Sheng Yang

Abstract: This paper studies the fabrication of curved surface artificial compound eyes and application in the optical imaging system. At present, the...


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