MEMS/NEMS Nano Technology

Volume 483

doi: 10.4028/

Paper Title Page

Authors: Jun Juan Zhao, Zhan Zhao, Li Dong Du, Shao Hua Wu

Abstract: Photoacoustic spectroscopy (PAS), which is widely used in gas sensing applications, is capable of a wide dynamic range, simplicity of use,...

Authors: Yuan Jun Guo, Zhi Yu Wen, Zhi Hai Zhang, Wei Wang

Abstract: A programmable micro mirror has been used in a near infrared spectrometer in order to achieve the purpose of signal multiplexing, to solve...

Authors: Yao Guang Li, Xiao Wei Liu, Yan Xiao, Yun Tao Liu

Abstract: This paper reports on a system level design and analysis of a single-loop fourth-order sigma-delta (ΣΔ) accelerometer. Compared with a...

Authors: Kun Bo Wang, Ying Jian Ma, Bo Zhang, Li Shuang Feng

Abstract: The application of integrated optical components into a single module provides a method of increasing the level of integration with the real...

Authors: Zhao Kui Meng, Zhi Chao Jiao, Hui Lan Liu, Li Shuang Feng, Ru Ya Li

Abstract: Resonator Integrated Optic Gyro (R-IOG) adopts advantages of the micro integrated optoelectronic technique, whose ring resonator is...

Authors: Rong Rong Qian, Zhi Yu Wen, Li Chen

Abstract: A novel piezoelectrically actuated scanning micromirror integrated with angle sensors is presented. The mirror with large size of...

Authors: Xiao Xiao Yan, Jing Quan Liu, Long Fei Wang, Chun Sheng Yang, Yi Gui Li

Abstract: Biopotential signals in shin tissue reflect the body’s healthy conditions. So the measurement of these signals can diagnose whether the body...

Authors: Nai Ke Wei, Zhu Gao Ni, Jun Yao, Jian Hua Zhu, Fu Hua Gao

Abstract: In this paper an innovative miniaturized spectrometer has been presented. The structure is similar to a grating spectrometer, but its...

Authors: Zi Chun Le, Bin Li, Jin Hua Hu

Abstract: A novel triplexer chip based on an asymmetric Y branch waveguide and a multimode interference is presented in this paper. Using the novel...

Authors: Guo Ping Du, Jian Zhu, Yuan Wei Yu, Shi Xing Jia, Li Li Jiang

Abstract: In this paper, a novel RF MEMS switch driven by combs with low insertion loss is presented. The developed SPST RF MEMS switch with a lateral...


Showing 81 to 90 of 154 Paper Titles