Pico-Newton Controlled Step-in Mode NC-AFM Using a Quadrature Frequency Demodulator and a Slim Probe in Air for CD-AFM


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We have studied a step-in mode non-contact atomic force microscopy (NC-AFM) for precise measurement of fine and steep structure with nanometer resolution in air. When a high aspect structure is measured using step-in mode AFM with the sharpened and slim probe, it is required that AFM control has to be performed at a force of <1 nN in pico-Newton range to suppress the bending and slipping of the probe on slop. Using a home-made step-in mode NC-AFM using a quadrature frequency demodulator for resonant frequency shift of the cantilever, the NC-AFM demonstrated that Si steep structure was faithfully observed at about 2 pN in air.



Edited by:

Osamu Hanaizumi, Masafumi Unno and Kenta Miura




S. Hosaka et al., "Pico-Newton Controlled Step-in Mode NC-AFM Using a Quadrature Frequency Demodulator and a Slim Probe in Air for CD-AFM", Key Engineering Materials, Vol. 497, pp. 95-100, 2012

Online since:

December 2011




[1] G. Binnig, C. F. Quate and Ch. Gerber, Phys. Rev. Lett. 56, 930 (1986).

[2] S. Hosaka, T. Morimoto, K. Kuroda, H. Kunitomo, T. Hiroki, T. Kitsukawa, S. Miwa, H. Yanagimoto and K. Murayama, Microelectronics Engineering 57-58, 651 (2001).

DOI: https://doi.org/10.1016/s0167-9317(01)00551-2

[3] S. Hosaka, S. Hosoki and K. Takada; Japanese patent No. P2936545 (submitted date 1988. 6. 24).

[4] For example; T. R. Albrecht, P. Grutter, D. Horne, and D. Rugar, J. Appl. Phys. 69, 668 (1991).

[5] For example; A. Kikukawa, S. Hosaka, Y. Honda, and S. Tanaka, Appl. Phys. Lett. 61, 2607 (1992).

[6] P. K. Hansma, D. Cleveland, M. Radmacher, D. A. Walters, P. E. Hillner, M. Bezanilla, C. Prater, J. Massle, V. Elings, Appl. Phys. Lett. 64, 1738 (1994).

DOI: https://doi.org/10.1063/1.111795

[7] S. Hosaka, T. Morimoto, H. Kuroda, Y. Minomoto, Y. Kembo, H. Koyabu, Appl. Surf. Sci. 188, 467 (2002).

DOI: https://doi.org/10.1016/s0169-4332(01)00934-5

[8] Sumio Hosaka, Daisuke Terauchi, Hayato Sone, Takafumi Morimoto, Yukio Kembo and Hajime Koyanagi, Jpn. J. Appl. Phys. 43, 3572 (2004).

DOI: https://doi.org/10.1143/jjap.43.3572

[9] Sumio Hosaka, Hirokazu Koyabu, Masamichi Noro, Katsuyuki Takizawa, Hayato Sone, and You Yin, J. Nanoscience and Nanotechnology, 10, 4522 (2010).

DOI: https://doi.org/10.1166/jnn.2010.2374