Design and Analysis of a Monolithic 3-Axis Micro-Accelerometer
Due to many inherently problems of accelerometers on market, such as complex fabrication process and low precision, a monolithic three-axis accelerometer is proposed and fabricated. The 3-axis accelerometer consists of four individual seismic mass, each has a wafer-thick of 240μm and is fabricated by anisotropic wet etching technology. In this paper, the design, fabrication, and characterization of the 3-axis accelerometer are presented. The performance is characterized and demonstrated.
X. H. Wang et al., "Design and Analysis of a Monolithic 3-Axis Micro-Accelerometer", Key Engineering Materials, Vol. 503, pp. 122-127, 2012