An Interface for Low-Q Micromachined Gyroscope
In this paper, an interface for low-Q micromachined gyroscope is designed. Based on the testified system architecture, the driving circuit with frequency modulation and PI controller, together with the sensing circuit contained twice demodulation, are designed. The bias stability of the gyroscope is 0.072 o/s, and the noise is 0.02o/s/Hz1/2.
G. S. Wang et al., "An Interface for Low-Q Micromachined Gyroscope", Key Engineering Materials, Vol. 503, pp. 128-133, 2012