Micro-Machined Electrochemical Seismic Sensors with Interdigital Electrodes
An electrochemical seismic sensor (ECSS), which consists of interdigital electrodes immersed in electrolyte solution, based on MEMS technology is studied theoretically and experimentally in the paper. The output current of the sensor is employed to measure the ground motion. The device has a small size, simple design and fabrication process with low cost. Preliminary test results show that the novel electrochemical seismic sensor has satisfactory characteristics.
G. B. Li et al., "Micro-Machined Electrochemical Seismic Sensors with Interdigital Electrodes", Key Engineering Materials, Vol. 503, pp. 61-66, 2012