Nano-Micro Geometric Modeling Using Microscopic Image
In recent years, there are a lot of active researches on nano-micro manufacturing and metrology, since not only industrial fields but also medical fields require higher accuracy with respect to miniaturizing size of the target. However, we cannot make an effective use of three dimensional measurement data for the nano-micro design and manufacturing due to a wide variety of instruments, resolutions, and noises. In fact, the nano-micro geometric modeling is at an early stage of development in spite of its importance for the next generation. In order to find a solution to this problem, we propose to combine the multi-resolution processing with the microscopic images for high speed and non-destructive geometric modeling as well as for the homogeneous modeling from micro features to macro ones. This research includes measurement data tiling between different instruments, high resolution optical microscopic imaging, focus judgment of three dimensional microscopic data, and large scale point crowd processing. These built models are potentially applied to in-line inspections and numerical simulations. Therefore, the nano-micro geometric modeling contribute to further developments of ultra precise manufacturing and the biotechnology.
Tojiro Aoyama, Hideki Aoyama, Atsushi Matsubara, Hayato Yoshioka and Libo Zhou
S. Usuki and K. T. Miura, "Nano-Micro Geometric Modeling Using Microscopic Image", Key Engineering Materials, Vols. 523-524, pp. 345-349, 2012