Precise Positioning of an Air Bearing Lead Screw Stage by Semi-Closed Loop Control


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An air bearing lead screw, whose nuts are levitated from the screw threads, has a great advantage of accurately transforming rotational motion to linear motion due to no friction, no backlash and no hysteresis. Therefor precise linear motion can be provided by precise rotational motion which can be obtained by a precise rotary encoder and a motor controller. We developed a positioning controller with servo sampling rate of 10 kHz that employed FPGA (Field Programmable Gate Array) and applied it to positioning of an air bearing stage. The stage consists of an air bearing lead screw and an air bearing linear guide. A rotary encoder, whose resolution has 225000 pulses per rotation, was directly mounted on an axis of the lead screw. This paper describes the positioning performance of the stage by the use of this semi-closed loop control, such as the resolution of less than 10 nm, the linearity over the long stroke.



Key Engineering Materials (Volumes 523-524)

Edited by:

Tojiro Aoyama, Hideki Aoyama, Atsushi Matsubara, Hayato Yoshioka and Libo Zhou




M. Fukuda and Y. Niwase, "Precise Positioning of an Air Bearing Lead Screw Stage by Semi-Closed Loop Control", Key Engineering Materials, Vols. 523-524, pp. 538-543, 2012

Online since:

November 2012




[1] M. Tsubone, A. Yamamoto: A study on an aerostatic bearing lead screw (1st report) Basic study of aerostatic analysis by thrust bearing modified model, Vol. 47, No. 10, 1981 September, pp.1216-1222. (In Japanese).

[2] T. Arai, I. Inasaki, T. Aoyama, S. Yonets, G. Iba, Development of static air bearing lead screw, Trans. Jpn. Soc. Mech. Eng. Series C, Vol. 49, 449 (1983 10), pp.1789-1798 (In Japanese).

[3] A. Satomi, A. Yamamoto, Studies on the aerostatic lead screws (1st Report) static rigidity in case of thrust bearing type model with ring shaped plane guide surfaces, J. Jpn. Soc. Prec. Eng., Vol. 50, No. 6 (1984 6) pp.975-980, (In Japanese).

[4] M. Kanai, S. Ishihara, Air bearing lead screw and nut using porous ceramic material, J. Jpn. Soc. Prec. Eng., Vol. 56, No. 12, (1990 12) pp.2201-2207, (In Japanese).


[5] M. Kanai, S. Ishihara, U.S. Patent 4, 793, 201. (1988).

[6] S. Ishihara, M. Suzuki, M. Kanai, M. Fukuda, An advanced x-ray stepper for 1/5-μm SR lithography, Microelectronic Engineering, Volume 17, Issues 1–4, March 1992, Pages 141–144.


[7] M. Fukuda, T. Taguchi, et al, Performance of X-ray stepper for next-generation lithography, Micro-processes and Nanotechnology Conference, 1999 International. Digest of Papers. Micro-processes and Nanotechnology '99, p.10.


[8] H. Tachikawa, M. Fukuda, K. Sato, A. Shimokohbe. Ultra Precision Positioning using Air Bearing Lead Screw. Trans. Jpn. Soci. Mech. Eng. Series C, Vol. 66, No. 645, 1559-1566(2000).


[9] K. G. Adair, S. G. Kapoor, R. E. DeVor, An approach to the economic manufacture of an aerostatic lead screw for micro-scale machine tools, Journal of manufacturing processes  01/2011 vol. 13, No. 1 pp.16-23.