A Valveless MEMS Pump Utilizing a Thin Film Permanent Magnet

Abstract:

Article Preview

A valveless MEMS pump utilizing a multi-layer thin film NdFeB/Ta permanent magnet (TFPM) has been presented. The MEMS pump consists of a diaphragm actuator utilizing 6μm in thickness and 3 mm in diameter TFPM which is bonded on a membrane made of polydimethylsiloxane (PDMS) of about 80μm thickness, a pump chamber and a pair of diffuser elements. TFPM is sputtered on a 50μm thick Nb sheet. The diffuser elements are used to generate a one-way fluid flow. The chamber is made of acryl plates. UV negative film resist is used to bond different layers. Applying amplitude of ±7.5V square wave voltage, the pump flow rate reaches to 130μL/min at frequency of 15Hz.

Info:

Periodical:

Key Engineering Materials (Volumes 523-524)

Edited by:

Tojiro Aoyama, Hideki Aoyama, Atsushi Matsubara, Hayato Yoshioka and Libo Zhou

Pages:

551-556

Citation:

C. Zhi et al., "A Valveless MEMS Pump Utilizing a Thin Film Permanent Magnet", Key Engineering Materials, Vols. 523-524, pp. 551-556, 2012

Online since:

November 2012

Export:

Price:

$38.00

[1] N. T. Nguyen, S. T. Wereley, Fundamentals and Applications of Microfluidics, 2nd ed., Artech House, MA, (2006).

[2] F. Amirouche, Y. Zhou, J. Tom, Current micropump technologies and their biomedical applications, Microsystem Technologies, 15(5) (2009) 647-666.

DOI: https://doi.org/10.1007/s00542-009-0804-7

[3] J. G. Smith, Netherlands. E. Patent, EP0134614. (1984).

[4] A. Olsson, P. Enoksson, G. Stemme, E. Stemme, A valve-less planar pump isotropically etched in silicon, J. Micromech. Microeng., 6 (1996) 87-91.

DOI: https://doi.org/10.1088/0960-1317/6/1/020

[5] C. Y. Lee, Z. H. Chen, Valveless impedance micropump with integrated magnetic diaphragm, Biomed Microdevices, 12 (2010) 197–205.

DOI: https://doi.org/10.1007/s10544-009-9375-8

[6] D. Xu, L. Wang, G. F. Ding, Y. Zhou, A. B. Yu, B. C. Cai, Characteristics and fabrication of NiTi/Si diaphragm micropump, Sensors and Actuators A, 93(1) (2001) 87-92.

DOI: https://doi.org/10.1016/s0924-4247(01)00628-8

[7] J. H. Kim, K. H. Na, C.J. Kang, Y.S. Kim, A disposable thermopneumatic-actuated micropump stacked with PDMS layers and ITO-coated glass, Sensors and Actuators. A, 120(2) (2005) 365-369.

DOI: https://doi.org/10.1016/j.sna.2004.12.024

[8] P. Woias, Micropumps-past, progress and future prospects, Sensors and Actuators B, 105(1) (2005) 28-38.

DOI: https://doi.org/10.1016/j.snb.2004.02.033

[9] C. Yamahata, C. Lotto, E. Al-Assaf, M. A. M. Gijs, A PMMA valveless micropump using electromagnetic actuation, Microfluidics and Nanofluidics, 1(3) (2005) 197-207.

DOI: https://doi.org/10.1007/s10404-004-0007-6

[10] V. T. Dau, T. X. Dinh, Q. D. Nguyen, R. Amarasinghe, K. Tanaka, S. Sugiyama, Microfluidic Valveless Pump Actuated by Electromagnetic Force, IEEE SENSORS (2009) 679-682.

DOI: https://doi.org/10.1109/icsens.2009.5398343

[11] C.Y. Lee, Z. Chen, Valveless impedance micropump with integrated magnetic diaphragm, Biomedical Microdevices, 12(2) (2010) 197-205.

DOI: https://doi.org/10.1007/s10544-009-9375-8

[12] X. M. Sun, Q. Yuan, D. M. Fang, H. X. Zhang, Electrodeposition and characterization of CoNiMnP permanent magnet arrays for MEMS applications, Nano/Micro Engineered and Molecular Systems (IEEE-NEMS), Kaohsiung, (2011) 367-371.

DOI: https://doi.org/10.1109/nems.2011.6017369

[13] U. Minoru, Microstructure and permanent magnet properties of a perpendicular anisotropic NdFeB/Ta multilayered thin film prepared by magnetron sputtering, Journal of Magnetism and Magnetic Materials, 284 (2004) 281-286.

DOI: https://doi.org/10.1016/j.jmmm.2004.06.047

[14] U. Minoru, N. Gennai, M. Fujiwara, T. Tanaka, Improved perpendicular anisotropy and permanent magnet properties in Co-doped Nd-Fe-B films multilayered with Ta, IEEE Transactions on Magnetics, 41 (2005) 3838-3843.

DOI: https://doi.org/10.1109/tmag.2005.854868

[15] E. Stemme, G. Stemme, A valveless diffuser/nozzle-based fluid pump, Sensors and Actuators A, 39(2) (1993) 159-167.

DOI: https://doi.org/10.1016/0924-4247(93)80213-z

[16] P. Mane, K. Mossi, R. Bryant, Synthetic jets with piezoelectric diaphragms, Proceedings of SPIE, Vol. 5761. (2005-9) 233-243.