A Valveless MEMS Pump Utilizing a Thin Film Permanent Magnet
A valveless MEMS pump utilizing a multi-layer thin film NdFeB/Ta permanent magnet (TFPM) has been presented. The MEMS pump consists of a diaphragm actuator utilizing 6μm in thickness and 3 mm in diameter TFPM which is bonded on a membrane made of polydimethylsiloxane (PDMS) of about 80μm thickness, a pump chamber and a pair of diffuser elements. TFPM is sputtered on a 50μm thick Nb sheet. The diffuser elements are used to generate a one-way fluid flow. The chamber is made of acryl plates. UV negative film resist is used to bond different layers. Applying amplitude of ±7.5V square wave voltage, the pump flow rate reaches to 130μL/min at frequency of 15Hz.
Tojiro Aoyama, Hideki Aoyama, Atsushi Matsubara, Hayato Yoshioka and Libo Zhou
C. Zhi et al., "A Valveless MEMS Pump Utilizing a Thin Film Permanent Magnet", Key Engineering Materials, Vols. 523-524, pp. 551-556, 2012