Fabrication and Characterization of AFM Probe Integrated with High-Aspect-Ratio Diamond Tip

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In order to realize a smart nano-machining and measurement system based on atomic force microscope (AFM), we have been developing diamond probes with a high-aspect-ratio, sharpened diamond tip. In this paper, we described the most important micromachining techniques for the fabrication of the diamond probes. The high-aspect-ratio diamond microstructures were successfully fabricated by employing our proposed two-step reactive ion etching (RIE) processes. A novel bonding technique of diamond to Si at wafer level was also developed by using an inorganic-organic hybrid sol-gel film (MeSiO3/2) as an adhesive layer to prepare a diamond/SOI wafer as the starting material. Moreover, we demonstrated the applicability of a fabricated diamond probe not only to AFM measurements but also to a tool for nanomachining.

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Periodical:

Key Engineering Materials (Volumes 523-524)

Edited by:

Tojiro Aoyama, Hideki Aoyama, Atsushi Matsubara, Hayato Yoshioka and Libo Zhou

Pages:

569-574

Citation:

T. Shibata et al., "Fabrication and Characterization of AFM Probe Integrated with High-Aspect-Ratio Diamond Tip", Key Engineering Materials, Vols. 523-524, pp. 569-574, 2012

Online since:

November 2012

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$38.00

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