Fabrication of Acoustic Emission Sensor Integrated with Cantilever Array for Detection of Signals Divided into Frequency Domain


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In order to detect acoustic emission (AE) signals which are transient elastic waves generated by rapid release of strain energy derived from deformation in materials etc., general AE sensors were fabricated by using a piezoelectric film for detection of AE signals. However, these sensors required frequency domain analysis after recording AE signal. Therefore, this research has been developing an AE sensor integrated with cantilever array with different resonant frequencies for detection of AE signals divided into frequency domain by using MEMS techniques. In this paper, a design of cantilever structures was executed. Theoretical analysis and simulation using ANSYS software revealed that a resonant frequency of a cantilever was increased with decrease of its length in the range from 100 k to 1 MHz. Therefore, fabrication and frequency characterization of a cantilever array fabricated in our batch fabrication process were executed.



Key Engineering Materials (Volumes 523-524)

Edited by:

Tojiro Aoyama, Hideki Aoyama, Atsushi Matsubara, Hayato Yoshioka and Libo Zhou




T. Kawashima et al., "Fabrication of Acoustic Emission Sensor Integrated with Cantilever Array for Detection of Signals Divided into Frequency Domain", Key Engineering Materials, Vols. 523-524, pp. 575-580, 2012

Online since:

November 2012




[1] H. Aburatani, K. Uchino, Acoustic emission (AE) measurement technique in piezoelectric ceramics, Jpn. J. Appl. Phys. 35 (1996) L516-L518.

DOI: https://doi.org/10.1143/jjap.35.l516

[2] K. Ito, M. Enoki, Acquisition and analysis of continuous acoustic emission waveform for classification of damage sources in ceramic fiber mat, Mater. Trans. 48 (2007) 1221-1226.

DOI: https://doi.org/10.2320/matertrans.i-mra2007850

[3] S.W. Or, H.L.W. Chan, C.L. Choy, P(VDF-TrFE) copolymer acoustic emission sensors, Sens. Act. A 80 (2000) 237-241.

DOI: https://doi.org/10.1016/s0924-4247(99)00305-2

[4] G.H. Feng, M.Y. Tsai, Acoustic emission sensor with structure-enhanced sensing mechanism based on micro-embossed piezoelectric polymer, Sens. Act. A 162 (2010) 100-106.

DOI: https://doi.org/10.1016/j.sna.2010.06.019

[5] M. Watanabe, M. Enoki, T. Kishi, Fracture behavior of ceramic coatings during thermal cycling evaluated by acoustic emission method using laser interferometers, Mater. Sci. Eng. A359 (2003) 368-374.

DOI: https://doi.org/10.1016/s0921-5093(03)00394-0

[6] T. Matsuo, H. Cho, M. Takemoto, Optical fiber acoustic emission system for monitoring molten salt attack, Sci. Technol. Adv. Mater. 7 (2006) 104-110.

[7] J.H. Zhao, Y.K. Shi, N. Shan, X.Q. Yuan, Stabilized fiber-optic extrinsic Fabry-Perot sensor system for acoustic emission measurement, Opt. Laser Tech. 40 (2008) 874-880.

DOI: https://doi.org/10.1016/j.optlastec.2007.11.002

[8] J.R. Lee, H. Tsuda, A novel fiber Bragg grating acoustic emission sensor head for mechanical tests, Scripta Materialia 53 (2005) 1181-1186.

DOI: https://doi.org/10.1016/j.scriptamat.2005.07.018

[9] D. Ozevin, D.W. Greve, I.J. Oppenheim, S.P. Pessiki, Resonant capacitive MEMS acoustic emission transducers, Smart Mater. Struct. 15 (2006) 1863-1871.

DOI: https://doi.org/10.1088/0964-1726/15/6/041

[10] C. Liu, Foundations of MEMS, second ed., Prentice Hall, New Jersey, 2011, p.539.