Actuation Force Measurement Mechanism for Non-Contact Ultrasonic Suspension


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In near-field levitation, an object can be levitated vertically upward above vibrating surface of an ultrasonic transducer. In this case, a repulsive force acts on the object. On the other hand, it has been reported that a minute object can be suspended vertically downward under the vibrating surface with a small gap in the air. We call this phenomenon ultrasonic suspension. Under the suspension, an attractive force acts on the object. When an object is suspended, there is restoring force, which pulls the object to the center of the vibrating surface. Our aim is to characterize the actuation forces under the suspension. Simultaneous measurement of vertical and horizontal actuation forces is required. A servo type measuring mechanism was proposed. A 1 DOF mechanism with a cantilever and a voice coil motor (VCM) was fabricated as a prototype. The prototype was calibrated and utilized for measurement of vertical actuation force. The result showed enough accuracy and repeatability. Then, a 2 DOF actuation force measurement mechanism was fabricated. The mechanism was consisted of a base to fix the object and two thin wires to support the base. Position of the base was controlled by three VCMs based on PID control. The ultrasonic suspension actuation forces were characterized successfully.



Key Engineering Materials (Volumes 523-524)

Edited by:

Tojiro Aoyama, Hideki Aoyama, Atsushi Matsubara, Hayato Yoshioka and Libo Zhou




M. Takasaki et al., "Actuation Force Measurement Mechanism for Non-Contact Ultrasonic Suspension", Key Engineering Materials, Vols. 523-524, pp. 727-732, 2012

Online since:

November 2012




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