Development of a Lens Driving Maglev Actuator for Laser Beam Off-Axis Cutting and Deep Piercing
In laser beam cutting and laser piercing process, the machining speed and quality are very sensitive to the flow of assist gas and laser beam focusing position. In order not only to improve the cutting speed and the removal capability of the molten material and to save the consumption of the gas flow in laser beam cutting, but also to realize high speed piercing of high aspect-ratio holes, a magnetic-levitated (maglev) lens driving actuator was proposed and fabricated. The actuator can drive the lens to achieve real-time positioning control of the relative radial displacement between the lens axis and the assist gas jet nozzle axis (off-axis control) in radial directions in a range of ±1mm within 1.5 μm of tracking error and bandwidths more than 150Hz, and to achieve real-time positioning control of laser beam focusing point in axial direction in a range of ±5mm within 3 μm of tracking error and bandwidth more than 100Hz.
Tojiro Aoyama, Hideki Aoyama, Atsushi Matsubara, Hayato Yoshioka and Libo Zhou
D. J. He et al., "Development of a Lens Driving Maglev Actuator for Laser Beam Off-Axis Cutting and Deep Piercing", Key Engineering Materials, Vols. 523-524, pp. 774-779, 2012