Cr-N Strain-Gauge-Type Precision Displacement Sensor for Measuring Positions of Micro Stage


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A strain-gauge-type precision displacement sensor, which is developed for a usage of micro-XY stage, is described in this paper. A thin-film strain-gauge element, which is made by Cr-N alloy, is directly fabricated on the base of the strain gauge. The direct fabrication and using the Cr-N element are expected to achieve higher sensitivity for displacement detection and better stability against the change of ambient temperature. In this study, several designs of the thin-film strain gauge, including both of two-gauge-type and four-gauge-type, are prepared to compare sensor performances such as sensitivity, stability and so on. The designed patterns of the strain-gauge element are directly fabricated on zirconia plates by using photolithography processes. The fabricated strain gauges are then evaluated as precision displacement sensors. At first, stability of the fabricated Cr-N strain-gauge-type displacement sensor was confirmed by comparing with the one made by a conventional strain gauge. Resolution of the fabricated Cr-N strain-gauge-type displacement sensors was then evaluated by comparing with a commercially-available laser displacement sensor, while giving sub-micrometer-order deformation to the strain-gauge-type displacement sensor. Details of the design, fabrication and evaluation results of the Cr-N strain-gauge-type displacement sensor are described.



Key Engineering Materials (Volumes 523-524)

Edited by:

Tojiro Aoyama, Hideki Aoyama, Atsushi Matsubara, Hayato Yoshioka and Libo Zhou




T. Azuma et al., "Cr-N Strain-Gauge-Type Precision Displacement Sensor for Measuring Positions of Micro Stage", Key Engineering Materials, Vols. 523-524, pp. 939-944, 2012

Online since:

November 2012




[1] Kee-Bong Choi, Jae Jong Lee, Seiichi Hata, A piezo-driven compliant stage with double mechanical amplification mechanisms arranged in parallel, Sensors and Actuators, A161, pp.173-181, (2010).


[2] Yuen Kuan Yong, Sumeet S. Aphale, and S. O. Reza Moheimani, Design, Identification, and Control of aFlexure-Based XY Stage for Fast Nanoscale Positioning, IEEE Transactions on Nanotechnology, Vol. 8, No. 1, pp.46-54, (2009).


[3] Shigeki MORI, Yuudai SATO, Akira SAKURADA, Akihiro NAGANAWA, Yotsujgi SHIBUYA, Goro OBINATA, 2D Nano-Motion Actuator for Precise Track Following, JSME, Vol. 4, No. 1, pp.301-314. (2010).


[4] Chanwoo Moon, Sungho Lee, J.K. Chung, A new fast inchworm type actuator with the robust I/Q heterodyne interferometer feedback, Mechatronics, 16, p.105–110, (2006).


[5] Takeshi Morita, Ryuichi Yoshida, Yasuhiro Okamoto and Toshiro Higuchi, Three DOF parallel link mechanism utilizing smooth impact drive mechanism, Precision Eng., Vol. 26, pp.289-295, (2002).


[6] J. Kaneko, Y. Peng, T. Azuma, W. Gao, and E. Niwa, Study on long-stroke micro-XY stage–design and fabrication of the stage system–, Proceedings of JSPE annual Conference in Spring, pp.477-478, (2011).

[7] Eiji Niwa, Yoshihiro Sasaki, Motofumi Homma 1 , Katashi Masumoto Cr-N strain sensitive thin films and their pressure sensor applications, The Institute of Electrical Engineers of Japan Technical meeting material, Physical sensor technical meeting. PHS-06-7, pp.29-34, (2006).

[8] Yoshihiro Sasaki, Eiji Niwa, Ken-ichi Arai, and Katashi Masumoto High Sensitive ForceSensor using Cr-N Thin Film Strain Gauge, The Japan Society of Mechanical Engineers annual meeting 2009, Vol. 5, pp.113-114, (2009).