Abnormal Capacitance Hysteresis Phenomena in Stacked Nanocrystalline-Si Based Metal Insulator Semiconductor Memory Structure

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Stack nanocrystalline-Si (nc-Si) based metal insulator semiconductor memory structure was fabricated by plasma enhanced chemical vapor deposition. The doubly stacked layers of nc-Si with the thickness of about 5 nm were fabricated by the layer-by-layer deposition technique with silane and hydrogen mixture gas. Capacitance-Voltage (C-V) measurements were used to investigate electron tunnel and storage characteristic. Abnormal capacitance hysteresis phenomena are obtained. The C-V results show that the flatband voltage increases at first, then decreases and finally increases, exhibiting a clear deep at gate voltage of 9 V. The charge transfer effect model was put forward to explain the electron storage and discharging mechanism of the stacked nc-Si based memory structure. The decreasing of flatband voltage at moderate programming bias is attributed to the transfer of electrons from the lower nc-Si layer to the upper nc-Si layer.

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Periodical:

Key Engineering Materials (Volumes 531-532)

Edited by:

Chunliang Zhang and Liangchi Zhang

Pages:

547-550

Citation:

X. Wang et al., "Abnormal Capacitance Hysteresis Phenomena in Stacked Nanocrystalline-Si Based Metal Insulator Semiconductor Memory Structure", Key Engineering Materials, Vols. 531-532, pp. 547-550, 2013

Online since:

December 2012

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$38.00

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