Research for Extraction Method of MEMS Devices Macro-Model
The purpose of extracting Macro-model of macro sensor is to find out the mathematical model representing system characteristics of behavior efficiently and accurately. A good understanding of the whole system, collaborative simulation with circuit and optimize system design are meaningful. Whether the extraction of device level Macro- model is truly effective or not, it directly influences the simulation results of system level. Therefore, an effective extraction method of Macro-model is crucial to system simulation. Meanwhile, fast and effective extraction approach for MEMS devices Macro-model will continue to be the main future development of technology. This paper presents a fast automatic extraction technology for Macro-model. Coordinating physical level and system level is to meet the demands of system level fast modeling and simulation.
Chunliang Zhang and Liangchi Zhang
H. Zhang et al., "Research for Extraction Method of MEMS Devices Macro-Model", Key Engineering Materials, Vols. 531-532, pp. 555-558, 2013