Research for Extraction Method of MEMS Devices Macro-Model


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The purpose of extracting Macro-model of macro sensor is to find out the mathematical model representing system characteristics of behavior efficiently and accurately. A good understanding of the whole system, collaborative simulation with circuit and optimize system design are meaningful. Whether the extraction of device level Macro- model is truly effective or not, it directly influences the simulation results of system level. Therefore, an effective extraction method of Macro-model is crucial to system simulation. Meanwhile, fast and effective extraction approach for MEMS devices Macro-model will continue to be the main future development of technology. This paper presents a fast automatic extraction technology for Macro-model. Coordinating physical level and system level is to meet the demands of system level fast modeling and simulation.



Key Engineering Materials (Volumes 531-532)

Edited by:

Chunliang Zhang and Liangchi Zhang




H. Zhang et al., "Research for Extraction Method of MEMS Devices Macro-Model", Key Engineering Materials, Vols. 531-532, pp. 555-558, 2013

Online since:

December 2012




[1] P.F. Huo, Study in system level modeling of MEMS ports component network method. (Ph.D. Northwestern Polytechnical University, China 2004), p.52.

[2] H.A.C. Tilmans, Equivalent circuit representation of lectromechanical transducers Lumped-parameter systems, Errata, Journal of Micromechanics Microengineering, Vol. 6 (1996) No. 3, p.359.


[3] W.J. Li, Analysis of coupling of MEMS multiple fields and optimization of multidisciplinary design. (MS. Northwest Polytechnical University, China. 2004), p.46.

[4] Q. Jing, and G.K. Fedder. NODAS1. 3-nodal design of actuators and sensors. IEEE/VIUF International Workshop on Behavioral Modeling and Simulation, (1998) No. 10, p, 27.

[5] Eric. J. Grimme, Krylov projection methods for model reduction, (Ph.D. University of Illinois at Urbana-Champaign, 1997). p.63.

[6] F. Peter Efficient linear circuit analysis by Pad approximation via the Lanczos process. IEEE Trans. CAD, Vol. 14 (1995) p.639.

[7] J.H. Chen, S.M. Kang. reduced-order modeling of weakly nonlinear MEMS devices with Tayloc-series expansion and Arnoldi approach. Journal of Micro electromechanical systems. Vo1. 13 (2004) No. 6, p.441.

[8] J. Haase, J. Bastian and S. Rei. VHDL-AMS in MEMS Design Flow: FOrum on Specifieation & Design Languages Vol. 2. (2002), No. 9, p.24.