Fabrication of Magnetic Tips for High-Resolution Magnetic Force Microscopy

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Effects of magnetic material, coating thickness, and tip radius on magnetic force microscope (MFM) spatial resolution have been systematically investigated. MFM tips are prepared by using an UHV sputtering system by coating magnetic materials on non-magnetic Si tips employing targets of Ni, Ni-Fe, Co, Fe, Fe-B, and Fe-Pd. MFM spatial resolutions better than 9 nm have been confirmed by employing magnetic tips coated with high magnetic moment materials with optimized thicknesses.

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Periodical:

Edited by:

Evangelos Hristoforou and D.S. Vlachos

Pages:

35-38

Citation:

M. Futamoto et al., "Fabrication of Magnetic Tips for High-Resolution Magnetic Force Microscopy", Key Engineering Materials, Vol. 543, pp. 35-38, 2013

Online since:

March 2013

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$38.00

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DOI: https://doi.org/10.1088/1742-6596/303/1/012014

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