Fluidic Sensor Realized in the LTCC Technology


Article Preview

This paper proposes a fully embedded LTCC (Low Temperature Co-fired Technology) fluidic sensor based on capacitive effect. The proposed capacitive fluidic sensor is built up by ten laser machined ceramic tape layers carrying holes and a micro-channel. The micro-channel is placed between capacitor electrodes which are screen printed and embedded inside the substrate. The operating principle of this sensor is based on the measurement of capacitance variations evoked with different permittivity values of induced fluids. By inserting various fluids in the micro-channel, capacitance of the sensor changes according to different permittivity values. Detection of various fluids has been performed. Experimentally attained results are compared with electrical characteristics determined by analytical calculations and good agreement is achieved.



Edited by:

Evangelos Hristoforou and Dr. Dimitros S. Vlachos




M. M. Pochia et al., "Fluidic Sensor Realized in the LTCC Technology", Key Engineering Materials, Vol. 543, pp. 435-438, 2013

Online since:

March 2013




[1] N. J. Florous, K. Saitoh, S. K. Varsheney, M. Koshiba: Fluidic Sensors Based on Photonic Crystal Fiber Gratings: Impact of the Ambient Temperature, IEEE Phot. Tech. Letters Vol. 11, (2006), pp.2206-2208.

DOI: https://doi.org/10.1109/lpt.2006.884275

[2] S. Wu, Q. Lin, Y. Yuen, Y.C. Tai: MEMS flow sensors for nano-fluidic applications, Sens. and Actuat. A, Vol. 89. (2001), pp.152-158.

DOI: https://doi.org/10.1016/s0924-4247(00)00541-0

[3] Information on http: /www. gillsensors. co. uk/content/level. htm.

[4] L. J. Golonka, T. Zawada, J. Radojewski, H. Roguszczak, M. Stefanow: LTCC Microfluidic System, Internat. Jour. of App. Cer. Tech., Vol. 3, Issue 2, (2006), p.150–156.

DOI: https://doi.org/10.1111/j.1744-7402.2006.02072.x

[5] W. Smetana, B. Balluch, G. Stangl, E. Gaubitzer, M. Edetsberger, G. Köhler: A multi-sensor biological monitoring module built up in LTCC-technology, Microelect. Engin., Vol. 84, No. 5-8, (2007), pp.1240-1243.

DOI: https://doi.org/10.1016/j.mee.2007.01.155

[6] W. Smetana: Low temperature ceramic processing for microsystem application, Ceram. Process. in Microtechn., Whittles Publishing, (2009), pp.208-225.

[7] G. Radosavljević, Lj. Živanov, W. Smetana, A. Marić, M. Unger, L. Nađ: A wireless embedded resonant pressure sensor fabricated in the standard LTCC technology, IEEE Sens. Jour. , Vol. 9, No. 12, (2009), p.1956-(1962).

DOI: https://doi.org/10.1109/jsen.2009.2030974

[8] Information on http: /www. ceramtec. com/ceramtape.

[9] Information on http: /www. orioninstruments. com/html/tools/dielectric. aspx.

[10] Information on http: /heraeus-thickfilm. com/en/home/home. aspx.