Synthesis of Si3 N4 And Si3 N4 -SiC Powders by an RF-Induction Plasma

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Periodical:

Key Engineering Materials (Volumes 89-91)

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Edited by:

Michael J. Hoffmann, Paul F. Becher and Günther Petzow

Pages:

41-46

Citation:

R. Mach et al., "Synthesis of Si3 N4 And Si3 N4 -SiC Powders by an RF-Induction Plasma", Key Engineering Materials, Vols. 89-91, pp. 41-46, 1994

Online since:

August 1993

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$38.00

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