Depth Profiling of Defects in Low Temperature MBE-Grown Silicon

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Periodical:

Materials Science Forum (Volumes 105-110)

Edited by:

Zs. Kajcsos and Cs. Szeles

Pages:

301-308

DOI:

10.4028/www.scientific.net/MSF.105-110.301

Citation:

T.E. Jackman et al., "Depth Profiling of Defects in Low Temperature MBE-Grown Silicon ", Materials Science Forum, Vols. 105-110, pp. 301-308, 1992

Online since:

January 1992

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$35.00

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