Stress and Volume Changes in Amorphous Mo/Si Multilayers on Annealing

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Periodical:

Edited by:

M.A.J. Somers, E.J. Mittemeijer and J. Schoonman

Pages:

55-68

DOI:

10.4028/www.scientific.net/MSF.154.55

Citation:

O.B. Loopstra et al., "Stress and Volume Changes in Amorphous Mo/Si Multilayers on Annealing", Materials Science Forum, Vol. 154, pp. 55-68, 1994

Online since:

March 1994

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$35.00

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