Precipitation of Cu, Ni and Fe on Frank-Type Partial Dislocations in Czochralski-Grown Silicon

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Periodical:

Materials Science Forum (Volumes 196-201)

Edited by:

M. Suezawa and H. Katayama-Yoshida

Pages:

1207-1212

DOI:

10.4028/www.scientific.net/MSF.196-201.1207

Citation:

B. Shen et al., "Precipitation of Cu, Ni and Fe on Frank-Type Partial Dislocations in Czochralski-Grown Silicon", Materials Science Forum, Vols. 196-201, pp. 1207-1212, 1995

Online since:

November 1995

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$35.00

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