Nature of D-Defect in CZ Silicon: D-Defect Dissolution and D-Defect Related T.D.D.B

Abstract:

Article Preview

Info:

Periodical:

Materials Science Forum (Volumes 196-201)

Edited by:

M. Suezawa and H. Katayama-Yoshida

Pages:

1697-1706

DOI:

10.4028/www.scientific.net/MSF.196-201.1697

Citation:

J.G. Park et al., "Nature of D-Defect in CZ Silicon: D-Defect Dissolution and D-Defect Related T.D.D.B", Materials Science Forum, Vols. 196-201, pp. 1697-1706, 1995

Online since:

November 1995

Export:

Price:

$35.00

In order to see related information, you need to Login.