Structural and Morphological Characterization of Al/Ti-Based Ohmic Contacts on p-Type 4H-SiC Annealed Under Various Conditions

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Periodical:

Materials Science Forum (Volumes 338-342)

Edited by:

Calvin H. Carter, Jr., Robert P. Devaty, and Gregory S. Rohrer

Pages:

1017-1020

DOI:

10.4028/www.scientific.net/MSF.338-342.1017

Citation:

K. Vassilevski et al., "Structural and Morphological Characterization of Al/Ti-Based Ohmic Contacts on p-Type 4H-SiC Annealed Under Various Conditions", Materials Science Forum, Vols. 338-342, pp. 1017-1020, 2000

Online since:

May 2000

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$35.00

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