Multi-Wafer VPE Growth and Characterization of SiC Epitaxial Layers

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Periodical:

Materials Science Forum (Volumes 338-342)

Edited by:

Calvin H. Carter, Jr., Robert P. Devaty, and Gregory S. Rohrer

Pages:

173-176

DOI:

10.4028/www.scientific.net/MSF.338-342.173

Citation:

H.D. Nordby, Jr. et al., "Multi-Wafer VPE Growth and Characterization of SiC Epitaxial Layers", Materials Science Forum, Vols. 338-342, pp. 173-176, 2000

Online since:

May 2000

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$35.00

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