Coimplantation Effects of (C and Si)/Ga in 6H-SiC

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Periodical:

Materials Science Forum (Volumes 338-342)

Edited by:

Calvin H. Carter, Jr., Robert P. Devaty, and Gregory S. Rohrer

Pages:

917-920

DOI:

10.4028/www.scientific.net/MSF.338-342.917

Citation:

Y. Tanaka et al., "Coimplantation Effects of (C and Si)/Ga in 6H-SiC", Materials Science Forum, Vols. 338-342, pp. 917-920, 2000

Online since:

May 2000

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$35.00

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