Vacancy-Type Defects in Proton-Irradiated 6H- and 4H-SiC: A Systematic Study with Positron Annihilation Techniques

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Periodical:

Materials Science Forum (Volumes 338-342)

Edited by:

Calvin H. Carter, Jr., Robert P. Devaty, and Gregory S. Rohrer

Pages:

969-972

DOI:

10.4028/www.scientific.net/MSF.338-342.969

Citation:

W. Puff et al., "Vacancy-Type Defects in Proton-Irradiated 6H- and 4H-SiC: A Systematic Study with Positron Annihilation Techniques", Materials Science Forum, Vols. 338-342, pp. 969-972, 2000

Online since:

May 2000

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