Annealing Effects in Hydrogenated Amorphous Silicon Layers

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Periodical:

Materials Science Forum (Volumes 363-365)

Edited by:

Werner Triftshäuser, Gottfried Kögel and Peter Sperr

Pages:

463-465

DOI:

10.4028/www.scientific.net/MSF.363-365.463

Citation:

A. Hempel et al., "Annealing Effects in Hydrogenated Amorphous Silicon Layers", Materials Science Forum, Vols. 363-365, pp. 463-465, 2001

Online since:

April 2001

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$38.00

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